Try using photosensitive polyimide.

Pavan

On Mon, Aug 3, 2009 at 12:17 PM, DongJuan Xi  wrote:

> polyimide
>
> On Sun, Aug 2, 2009 at 6:01 PM, Reza Rashidi wrote:
> > Hi everyone,
> >
> > Does anybody know which photoresist with a thickness of 10 um (other than
> SU-8) doesn't melt up to 180 C? How good is SPR? I want to pattern a
> photoresist layer on si which permanently stays in the middle of device and
> acts as a spacer between two chips. However, changing mechanical properties
> of the photoresist with temperature doesn't matter. The device works at high
> temperature.
> >
> > Any suggestions would be highly appreciated.
> >
> > Thanks,
> > Reza

--
Pavan Samudrala