Need more information.  Do you mean HMDS instead of HDMS?  Do you want
to stick to the SU8 mold? Do you want a release agent from the SU8 mold?
HMDS is not toxic, it liberates a small amount of ammonia when it reacts
with the Hydrogen in moisture.  Bill Moffat

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Shao Guocheng
Sent: Monday, August 10, 2009 7:14 PM
To: [email protected]
Subject: [mems-talk] HDMS treatment of SU8 mold used for PDMS thin
filmfabrication

Hi, Guys,

    I'm trying to make some PDMS thin film about 40um thick. Without
using any anti-sticking agent, I'm able to get the film with small size,
but have hard time obtain bigger piece. So I'm thinking about doing
silanization treatment for my SU8 mold. We have HDMS available in our
lab. Can any one share some experience about SU8 mold silanization. what
kinda protocol should I take, any special precautions because from what
I know, HDMS is toxic, although maybe not as bad as some other silane
like TMCS.   thx

Shao