Hello,

You can use Dry etch BCB (3000-serie.
Inhere we use it for W2W bonding.

Regards,

Peter Kuijpers
MiPlaza Technology Laboratories
Philips Research Europe
High Tech Campus 04
Postbox HTC-4-1
5656 AE Eindhoven
The Netherlands
Tel.: +31 402743667
        +31 612507027
Email: [email protected]

-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of Ulli Hansen
Sent: Tuesday 11 August 2009 17:09
To: [email protected]
Subject: [mems-talk] thermally curable glue

Hi everyone,

I am looking for glues that can be spun on as thin coatings (few micrometers)
and can be cured entirely thermal. Any kind of UV initiation is not possible, as
both bond partners are not transparent.

Any hints?

thanks
Ulli