A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: thermally curable glue
thermally curable glue
2009-08-11
Ulli Hansen
2009-08-11
Brian Stahl
2009-08-13
Kuijpers, Peter
2009-08-14
Fei Wang
2009-08-14
Kuijpers, Peter
2009-08-17
Roger Shile
2009-08-18
Kuijpers, Peter
2009-08-18
Roger Shile
thermally curable glue
Fei Wang
2009-08-14
Hi all,

I am also trying to find a good way to do wafer bonding with thick
layer like 60um. Is that possible for SU-8 or BCB?

Thanks a lot!

2009/8/13, Kuijpers, Peter :
> Hello,
>
> You can use Dry etch BCB (3000-serie.
> Inhere we use it for W2W bonding.
>
> Regards,
>
> Peter Kuijpers
--
Best regards,
Yours sincerely
Fei Wang
______________
Postdoctoral researcher, Dr
MIC - Department of Micro and Nanotechnology
Technical University of Denmark (DTU)
Building 344, 1st floor, Room no. 130
DK-2800, Kgs. Lyngby
Denmark
Tel:  +45 4525 6311
Fax:  +45 4588 7762
Email: [email protected]
       http://www.nanotech.dtu.dk
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
The Branford Group
Nano-Master, Inc.
Harrick Plasma, Inc.