Hello,

This is rather thick for spincoating, but I maybe you can use a dry film
 In the past we used a dry film from FujiFilm

Best regards,

Peter Kuijpers
MiPlaza Technology Laboratories
Philips Research Europe
High Tech Campus 04
Postbox HTC-4-1
5656 AE Eindhoven
The Netherlands
Tel.: +31 402743667
        +31 612507027
Email: [email protected]

-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of Fei Wang
Sent: Friday 14 August 2009 11:23
To: General MEMS discussion
Subject: Re: [mems-talk] thermally curable glue

Hi all,

I am also trying to find a good way to do wafer bonding with thick
layer like 60um. Is that possible for SU-8 or BCB?