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MEMSnet Home: MEMS-Talk: Lift- off Ti/Pt
Lift- off Ti/Pt
2009-08-20
Shah, Forum N
2009-08-20
Ruiz, Marcos Daniel (SENCOE)
2009-08-21
Huihang Dong
2009-08-21
DongJuan Xi
2009-08-21
Xiaoguang Liu
2009-08-21
Huihang Dong
2009-08-21
Brad Cantos
2009-08-22
Xiaoguang Liu
2009-08-22
Wilson, Thomas
2009-08-22
Brad Cantos
2009-08-21
mikas remeika
2009-08-22
Wilson, Thomas
2009-08-22
Brad Cantos
Lift- off Ti/Pt
Shah, Forum N
2009-08-20
Hello All,

I am sputtering a 250 Angstrom adhesion layer of  Ti and 1500 angstrom adhesion
layer of Platinum.

Can someone tell me how long does it take for the lift - off to occur if the PR
thickness is around 7 microns.

And also if someone can tell me if Chrome or titanium is a better adhesion layer
for Platinum.

Thanks in Advance,

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