Hi,

I patterned Ti-Pt on cured polyimide layer by lift-off (don't know what is your
substrate).
The PR 1827(around 2.7 um) was patterned by Image reversal which can give you
negative angle on the edge of trench to make lift-off easier. The Lift-off took
me about 10-20 min.

Hope this can help.

Thanks,
Huihang

> Date: Thu, 20 Aug 2009 17:49:43 -0400
> From: [email protected]
> To: [email protected]
> Subject: Re: [mems-talk] Lift- off Ti/Pt
>
> In my experience both seem to work pretty well.  If you use Ti, do not
> expose the device to HF after patterning the metal.
>
> Dan