I would guess yes.  I have bonded a flexible polymer to a glass slide
with only 15 seconds of argon plasma.  The resulting meld is still
sitting on my desk 10 years later.  The glass slide is broken in a vain
attempt to break apart.  I am on vacation at the moment.  When I get
back to YES in a weeks time I will send you complete details.

Bill Moffat

________________________________

From: [email protected] on behalf of marwan rjoub
Sent: Fri 8/21/2009 7:53 PM
To: [email protected]
Subject: [mems-talk] Plasma (Corona) Bonding PDMS to silicon Nitride

Hi;

Is it possible to bond PDMS to silicon nitride using plasma (corona)
treatment? It is working for me to bond SiO2 to PDMS.

Regards