Hello all,
I am stripping AZ resists in AZ400T stripper (immersion based stripping).
After stripping, I see small particles of resist lying on the wafer. Does
anyone have a good method of stripping the wafers or cleaning the stripped
wafers to make it particle free.
The environment I work is not a clean room and will not be particle free.
But I am trying to reduce the particles on the wafers as much as humanly
possible.
Regards,
Pavan Samudrala