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MEMSnet Home: MEMS-Talk: Lift-off 8000 A gold using PR 5214
Lift-off 8000 A gold using PR 5214
2009-08-25
Chih-Chieh Cheng
2009-08-25
Wilson, Thomas
2009-08-26
Bill Moffat
2009-08-27
Te LI
Lift-off 8000 A gold using PR 5214
Bill Moffat
2009-08-26
70,000 Angstroms of Indium for a flip chip process.  130,000 Angstroms
of standard positive resist and image reversal.  I am on vacation this
week.  I will send technical papers next week.  Bill Moffat

________________________________

From: [email protected] on behalf of Chih-Chieh Cheng
Sent: Tue 8/25/2009 12:51 PM
To: [email protected]
Subject: [mems-talk] Lift-off 8000 A gold using PR 5214


Hello everyone,

As title, has anyone ever tried lift-off 8000 A gold (or any other
metal) using PR 5214?  The thickness of gold is relatively thick so I am
wondering it may not work perfectly.

Thanks for your time.

CC
reply
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