Dear All:

  I’m working on silicon-glass bonding with polymer. Now I want to inspect the
interface between silicon and glass. Though the glass is transparent for optical
microscope inspection, the uncovered interface is better for me. Thus I need to
etch the glass without hurt the polymer interface. Are there some good methods
for this purpose? Hope for your help.

Best Regards!


Bugnie
KAIST, ROK
[email protected]
2009-09-02