>Dear all,
>
>I am currently working on SU-8, negative photoresist. I have been looking
>for the mechanical properties (like young modulus, hardness, density,
>modulus of elasticity etc) of this material. I would like to know the
>mechanical properties of this material under any condition. I would greatly
>appreciate your help. Thank you.
>
>Best regards
>Andrew Ho
>Nanyang Technological University
>
Dear Sir,

It makes now 2.5 years that I am working with SU8 photoepoxy (this material has
partily been developed in our lab at the Swiss Federal Insitute of Technology in
Lausanne in 1996).

We have published last year a paper describing the mechanical properties of the
SU8. The references of this paper are:

H. Lorenz, M. Laudon, P. Renaud, "Mechanical Characterisation of a New High-
Aspect-Ratio Near UV-Photoresist", Proceedings of the MNE'97 conference, Athens,
Greece, September 1997.

If you have some problems to get this paper, please give me your fax number and
I will send you a copy of this paper.

We are now creating a small company, called SOTEC MICROSYSTEMS, where we will
sell photoepoxy materials and products.

We have the following photoepoxy variations :

SU8 based photoepoxies:
 SM1040 : for thin films  (1-10 microns)
 SM1042 : for thin films, with better properties concerning the dimensions of
the final structure
 SM1060 : for medium size films (10-50 microns)
 SM1062 : for medium films,with better properties concerning the dim. of the
final structure
 SM1070 : for thick layers (20-500 microns)
 SM1072 : for thick films, with better properties concerning the dim. of the
final structure.
Other formulations are possible if required.

other photoepoxies:
  SM2060 and SM2062:    Similar to SM1060/2, but based on other epoxies and
requiring lower softbake temperatures.

All the solutions are filtered trough a 0.4 micron filter.

The prices are the following ones (for every formulation):
                0.5 liter (mimimum quantity)   180 USD or 270,- CHF
                1.0 liter
300 USD or 400,- CHF

The prices exclude package, posting and VAT. The bottles are send by normal post
or airmail. If a fast delivery is requested, they are send by fast-mail such as
FedEX or others, at an additional cost of 50 USD (75,-CHF) per mail. The
delivery time is between 2 and 3 weeks.

We are trying to develop new photoepoxies. A first improvement will be
photoepoxies with better adhesion properities, which are more flexible and which
have lower coefficients of thermal expansions. In a second attempt we will try
to develop photoepoxies based on other epoxies, which have other properties and
which might be used for example at higher temperatures (higher than 350 °C; the
maximum temperature of the SU8-based photoepoxies is about 250 °C).

I hope this helps you. Should you have any more questions about SU8 or related
subjects, please contact me.

Dr Louis J. Guerin

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Dr Louis J. Guerin
Institute for Microsystems
EPFL- Swiss Federal Institute of Technology Lausanne
CH-1015 Lausanne
tél: (+41 21) 693 5857
fax: (+41 21) 693 6670
email: [email protected]

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*          visit our WEB page on URL: http://dmtwww.epfl.ch/ims
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*
*                            visit our SU8 WEB page on URL:
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* http://dmtwww.epfl.ch/ims/micsys/subtopics/projects/su8/EPON.html     *
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