I'm wondering, if you delete the cross-linking step, how does it
withstand the development solution?

Bets regards
Maria


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Bob Henderson
Sent: 8. september 2009 22:02
To: 'General MEMS discussion'
Subject: Re: [mems-talk] SU8

We just eliminated the second bake. Bob Henderson

-----Original Message-----
From: [email protected]
[mailto:[email protected]]
On Behalf Of Yu Wang
Sent: Tuesday, September 08, 2009 10:51 AM
To: General MEMS discussion
Subject: Re: [mems-talk] SU8

Hi, Ken,

I'm very interested in your process. Would you please tell me how you
avoided cross-linking (from softbaking to DRIE)?

Thanks,

Yu