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MEMSnet Home: MEMS-Talk: SU8
SU8
2009-09-08
renil kumar
2009-09-08
Bob Henderson
2009-09-08
Yu Wang
2009-09-08
Bob Henderson
2009-09-11
Maria Matschuk
2009-09-11
Bob Henderson
2009-09-15
eowin rohan
2009-09-15
Gareth Jenkins
2009-09-15
James Paul Grant
2009-09-15
Bob Henderson
2009-09-16
Brubaker Chad
2009-09-21
James Paul Grant
2009-09-15
Barbara Cortese
SU8
Barbara Cortese
2009-09-15
Also you need the first step in order to not have your mask sticking to your
sample.


> Hello María,
>
> The first bake is just to evaporate the solvent, so the SU-8 remains
completely
> soluble in developer.
>
> --- Den fre 2009-09-11 skrev Maria Matschuk :
>
> Från: Maria Matschuk 
> Ämne: Re: [mems-talk] SU8
> Till: "General MEMS discussion" 
> Datum: fredag 11 september 2009 11.23
>
> I'm wondering, if you delete the cross-linking step, how does it
> withstand the development solution?
>
> Bets regards
> Maria
reply
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