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MEMSnet Home: MEMS-Talk: SU8
SU8
2009-09-08
renil kumar
2009-09-08
Bob Henderson
2009-09-08
Yu Wang
2009-09-08
Bob Henderson
2009-09-11
Maria Matschuk
2009-09-11
Bob Henderson
2009-09-15
eowin rohan
2009-09-15
Gareth Jenkins
2009-09-15
James Paul Grant
2009-09-15
Bob Henderson
2009-09-16
Brubaker Chad
2009-09-21
James Paul Grant
2009-09-15
Barbara Cortese
SU8
Gareth Jenkins
2009-09-15
I too am having trouble understanding this! My guess is some cross-linking
occurs without the bake - at least enough to allow development of the
pattern without it totally lifting off.
Using a release agent such as Omnicoat would also be an option for this
process.

On Fri, Sep 11, 2009 at 10:23, Maria Matschuk <
[email protected]> wrote:

> I'm wondering, if you delete the cross-linking step, how does it
> withstand the development solution?
>
> Bets regards
> Maria
>
reply
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