A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Pt Ion Milling
Pt Ion Milling
2009-09-14
Deepasree Konduparthi
2009-09-15
Morrison, Richard H., Jr.
2009-09-15
Ruiz, Marcos Daniel (SENCOE)
2009-09-15
Ad Hall
Pt Ion Milling
Ruiz, Marcos Daniel (SENCOE)
2009-09-15
This has also been my experience.

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Morrison, Richard
H., Jr.
Sent: Tuesday, September 15, 2009 11:49 AM
To: [email protected]; General MEMS discussion
Subject: Re: [mems-talk] Pt Ion Milling

Hi,

Ion Mill does not have any selectivity, it etches at the sputter rate of
the material, everything etches, organics are slower than metals but
most metals are real close to each other for sputter rate.

Rick
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
The Branford Group
Nano-Master, Inc.
Mentor Graphics Corporation