Here are some ion mill selectivity numbers for Au:Ti:Si

1.76 : 0.38 : 0.39

It will depend on your Accelerator Voltage but this is a good reference.

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-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Ruiz, Marcos Daniel (SENCOE)
Sent: Tuesday, September 15, 2009 1:24 PM
To: General MEMS discussion; [email protected]
Subject: Re: [mems-talk] Pt Ion Milling

This has also been my experience.

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Morrison, Richard
H., Jr.
Sent: Tuesday, September 15, 2009 11:49 AM
To: [email protected]; General MEMS discussion
Subject: Re: [mems-talk] Pt Ion Milling

Hi,

Ion Mill does not have any selectivity, it etches at the sputter rate of
the material, everything etches, organics are slower than metals but
most metals are real close to each other for sputter rate.

Rick