I agree that iodide/iodine-Turkey Blood would be much better choice
particularly if you have a photoresist pattern you want to reproduce.

Bob Henderson

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Gareth Jenkins
Sent: Wednesday, September 16, 2009 1:06 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Receipe for diluted aqua regia

Have you considered potassium iodide + iodine? I'm not sure about exact etch
rates but believe it to be much less aggressive than aqua regia.