CRC has a three book set that covers MEMS basics.

Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of mikas remeika
Sent: Wednesday, September 16, 2009 10:14 AM
To: General MEMS discussion
Subject: [mems-talk] Introductory MEMS books

This actually brings up an interesting point,

Most of the people I know have learned everything they know about
semiconductor processing from colleagues and by reading spec-sheets.
Occasionally, however, it is interesting to read about more general
aspects of the micro/nanofabrication that don't necessarily relate to
one's own work.

So, I'm interested, what books would the readers of this forum
recommend as a general introduction to the field. Something that would
not be completely basic, i.e. contain usable technical information,
but not to the point of being a reference book, and preferably not a
textbook for undergraduates.

Looking forwards to your suggestions,
-mikas