Hi Mikas,

beside spezial MEMS literature that might be available I would still recommend
the good old SZE  - "VLSI Technology"  S.M.Sze (Bell Labs)  McGraw-Hill Book
Company.

A similar one would be "Silicon Processing for the VLSI Era - volume 1: Process
Technology"  edited by Stanley Wolf / Richard N.Tauber - Lattice Press.

These both you maybe know already - a more recent one would be "Semiconductor
Micromachining - volume 2: Techniques and Industrial Applications"  edited by
S.A.Campbell / H.J.Lewerenz - Wiley.

Best regards,

Karl

----------------------------------------

Karl Kuehl
Technical Manager
Fraunhofer Institute for Reliability and Microintegration
Hansastrasse 27d
80686 Muenchen
Germany
Tel.:  +49 (0)89 54759 237
Fax:   +49 (0)89 54759 550
email: [email protected]
http://www.izm-m.fraunhofer.de/