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MEMSnet Home: MEMS-Talk: Introductory MEMS books
Hard mask etching
2009-09-10
mohammad uves mustakim ahmed
2009-09-11
Te LI
Introductory MEMS books
2009-09-16
mikas remeika
2009-09-16
shay kaplan
2009-09-17
Yan Xin
2009-09-17
Kühl Karl
2009-09-17
Feng Han Hua
2009-09-17
Prasanna Srinivasan
2009-09-17
Gareth Jenkins
Introductory MEMS books
Feng Han Hua
2009-09-17
I think "Microchip Fabrication - a practical guide to semiconductor
processing" by Peter Van Zant, is a very good such book.

-----Original Message-----
From: mikas remeika [mailto:[email protected]]
Sent: Wednesday, September 16, 2009 3:14 PM
To: General MEMS discussion
Subject: [mems-talk] Introductory MEMS books

This actually brings up an interesting point,

Most of the people I know have learned everything they know about
semiconductor processing from colleagues and by reading spec-sheets.
Occasionally, however, it is interesting to read about more general
aspects of the micro/nanofabrication that don't necessarily relate to
one's own work.

So, I'm interested, what books would the readers of this forum recommend
as a general introduction to the field. Something that would not be
completely basic, i.e. contain usable technical information, but not to
the point of being a reference book, and preferably not a textbook for
undergraduates.

Looking forwards to your suggestions,
-mikas
reply
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