Hi everyone,
I have a pressure sensor with a 60 um thick Si membrane which is going to expose
to a basic environment (pH=13) at 170 °C and up to 300 psi. I am going to grow a
silicon dioxide layer on the membrane and then coat a parylene film to protect
it. I am wondering if it is possible to grow a silicon dioxide layer on a thin
membrane (rather than a thick si wafer which is regular process), also, if these
two layers together can protect the membrane for 8 hours.
Any advise would be highly appreciated.
Thanks,
Reza Rashidi
