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MEMSnet Home: MEMS-Talk: alignment on PDMS
alignment on PDMS
2009-09-27
nidhi maheshwari
2009-09-28
Gareth Jenkins
alignment on PDMS
nidhi maheshwari
2009-09-27
Dear All,

I have to do some photolithography patterning into PDMS channels. I am
facing a challenge in alignment as PDMS seems to be shrinking once it
is taken out from the master on which it is casted. The extent of
shrinkage also varies from one PDMS sheet to another.
Incidentally, this PDMS is not even matching the SU-8 master from
which it was casted (tried aligning PDMS channels and SU-8 master on
double sided aligner).

I would like to know if such a problem was faced by anyone and what
can be the plausible solution to it.

Regards,
Nidhi Maheshwari
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