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MEMSnet Home: MEMS-Talk: parylene adhesion on Silicon
parylene adhesion on Silicon
2009-09-30
Reza Rashidi
2009-09-30
Shay Kaplan
2009-09-30
Bill Moffat
2009-09-30
Michael D Martin
2009-10-01
Kagan Topalli
parylene adhesion on Silicon
Reza Rashidi
2009-09-30
Hi,

I have a silicon wafer with a 5 um parylene on it which is a chemical protector.
The package will operate at 170C and up to 300 psi in a basic solution. Due to
poor adhesion of parylene, the liquid penetrates under the parylene film. I am
wondering how I can increase the adhesion.

Your advise will be appreciated.

Thnaks,
Reza

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