Try silane treatment before deposition.

shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Reza Rashidi
Sent: Wednesday, September 30, 2009 4:46 AM
To: mems talk
Subject: [mems-talk] parylene adhesion on Silicon

Hi,

I have a silicon wafer with a 5 um parylene on it which is a chemical
protector. The package will operate at 170C and up to 300 psi in a basic
solution. Due to poor adhesion of parylene, the liquid penetrates under the
parylene film. I am wondering how I can increase the adhesion.

Your advise will be appreciated.

Thnaks,
Reza