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MEMSnet Home: MEMS-Talk: Bilayer photoresist process
Bilayer photoresist process
2009-10-01
Andrea Lucibello
2009-10-02
Jie Zou
2009-10-02
Andrew Sarangan
2009-10-02
Daniel Lloyd
2009-10-03
Andrea Lucibello
2009-10-03
Andrew Sarangan
2009-10-04
Jie Zou
2009-10-04
Andrea Lucibello
2009-10-05
Daniel Lloyd
2009-10-05
Andrew Sarangan
Bilayer photoresist process
Andrea Lucibello
2009-10-01
Hi all,

Does anyone know if it is possible to planarize photoresist (change its shape
from square to round)? I know that exist a method called Bilayer photoresist
process?  How does this process work?

Thanks in advance for the help.

Regards
A.L
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