Dear Reza,

You may want to have a look at the paper in Transducers '09 presented by Y.C.
Tai's group at Caltech. The title of the paper is directly related with the
adhesion of parylene to silicon.

Good luck.

Kagan TOPALLI, Ph. D.
Senior Research Engineer
METU-MEMS Center
Middle East Technical University
TR-06531 Ankara Turkey
Phone: +90 312 210 45 46
Fax: +90 312 210 23 04
http://www.mems.eee.metu.edu.tr/~topalli/
--

Reza Rashidi wrote:
> Hi,
>
> I have a silicon wafer with a 5 um parylene on it which is a chemical
protector. The package will operate at 170C and up to 300 psi in a basic
solution. Due to poor adhesion of parylene, the liquid penetrates under the
parylene film. I am wondering how I can increase the adhesion.
>
> Your advise will be appreciated.
>
> Thnaks,
> Reza