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MEMSnet Home: MEMS-Talk: Bilayer photoresist process
Bilayer photoresist process
2009-10-01
Andrea Lucibello
2009-10-02
Jie Zou
2009-10-02
Andrew Sarangan
2009-10-02
Daniel Lloyd
2009-10-03
Andrea Lucibello
2009-10-03
Andrew Sarangan
2009-10-04
Jie Zou
2009-10-04
Andrea Lucibello
2009-10-05
Daniel Lloyd
2009-10-05
Andrew Sarangan
Bilayer photoresist process
Jie Zou
2009-10-04
Hey Andrea,

Upload your picture for the cross section somewhere and give us a link.
Otherwise it's super difficult to explain I guess.

Jie

On Sat, Oct 3, 2009 at 2:47 PM, Andrew Sarangan  wrote:

> It is still not clear to me what you are attempting to do. Are you
> trying to change the sidewall profile of the resist? If so, reflowing
> is a good way to go. The spikes you refer to are also not clear to me.

*  Zou Jie (Jay)
*  Department of Physics
*  University of Florida
*  Tel: +1-352-846-8018
*  Email: [email protected]
*  Homepage: http://plaza.ufl.edu/zoujie/
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