In general you cannot electroplate to Silicon you need a seed for the
metal to plate to.

Rick


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of lin yu
Sent: Tuesday, October 13, 2009 3:21 PM
To: General MEMS discussion
Subject: [mems-talk] Electroplating question

Hi,

I'm working on a process which prevents me using a metal seed layer.
So we considered using low-resistivity Si substrate as the conducting
layer for metal electroplating. I was wondering if anyone has done this
before? What's the risk of this process?

Thanks,
Lin