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MEMSnet Home: MEMS-Talk: RIE etching iron/iron oxide
RIE etching iron/iron oxide
2009-10-26
Xiaoning Wang
2009-10-27
Edward Sebesta
2009-10-28
Edward Sebesta
RIE etching iron/iron oxide
Xiaoning Wang
2009-10-26
Hello MEMS-Talk,

Is it possible to etch iron or iron oxide thin film using RIE?  What kind of
recipe should I use? I've been searching the literature but didn't come up
with anything.  Does anyone have an idea on this?

Thanks a lot!

--
Xiaoning Wang (Travis)
Graduate Student
Mechanical Engineering
Boston University
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