One obnoxious quality of postitve resist is the bead at the edge of the
wafer after spin will not come off in the developer as it does (pretty much)
with negative resist.  There are, of course, work arounds so it is hardly
ever a deal breaker.

Roger Brennan
Solecon Labs
Reno, NV 89521-5926
[email protected]


-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Paul Nguyen
Sent: Tuesday, October 27, 2009 8:24 AM
To: [email protected]
Subject: [mems-talk] Positive vs. Negative Resists in MEMS processing


Dear all:

I would like to hear your experiences of using Positive vs. Negative resists
in MEMS processing.   What are the PRO vs. CON?  I appreciate your
information.

Thanks and regards,
Paul