Image reversal with flood exposure control allows -22 degrees, through
vertical to +22 degrees.  Bill Moffat

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From: [email protected] on behalf of QiuWeibin
Sent: Fri 10/30/2009 2:16 PM
To: [email protected]
Subject: [mems-talk] vertical taper Photoresist profile




 Dear All,

    We are trying to get the vertical taper PR profile with 8mm size and =
0-1.5um thickness. Can anyone give us some suggestion?  We want to avoid =
a grey scale mask, since they are so costly.

Thanks a lot

Qiu