http://en.wikibooks.org/wiki/Microtechnology/Etching_Processes

I hope this links helps,
regards.


--- On Fri, 11/6/09, [email protected]  wrote:

From: [email protected] 
Subject: [mems-talk] List of attacked/etched materials
To: [email protected]
Date: Friday, November 6, 2009, 6:41 AM

Hi,

I am looking for papers/books/publications stating which metal is
etched/attacked/not attacked by the most common etchants (mainly HF, HCl,
H2O2, citric acid, phosphoric acid). Furthermore I'd like to find also
information about attack of some common semiconductors and oxides (like
GaAs, Si, Al2O3, SiO2, HfO2).

I could only find books showing which etchant etches BEST which metal - like
the book 'Advanced Inorganic Chemistry' of F. Cotton. But I need to know if
there is non/some/a lot of attack of a material. E.g. is Nickel totally
stable in HCl, Cr in HF etc., or is there a considerable attack?

Thanks in advance
Daniel