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MEMSnet Home: MEMS-Talk: List of attacked/etched materials
List of attacked/etched materials
2009-11-06
[email protected]
2009-11-06
Loren St. Clair
2009-11-06
antwi nimo
2009-11-07
Edward Sebesta
List of attacked/etched materials
Edward Sebesta
2009-11-07
You need a corrosion table. These are tables which the etch rate or
material loss per area for a list of metals versus a list of liquids.
There are quite a variety of these lists.

Ed

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
[email protected]
Sent: Friday, November 06, 2009 8:42 AM
To: [email protected]
Subject: [mems-talk] List of attacked/etched materials


Hi,

I am looking for papers/books/publications stating which metal is
etched/attacked/not attacked by the most common etchants (mainly HF,
HCl, H2O2, citric acid, phosphoric acid). Furthermore I'd like to find
also information about attack of some common semiconductors and oxides
(like GaAs, Si, Al2O3, SiO2, HfO2).

I could only find books showing which etchant etches BEST which metal -
like the book 'Advanced Inorganic Chemistry' of F. Cotton. But I need to
know if there is non/some/a lot of attack of a material. E.g. is Nickel
totally stable in HCl, Cr in HF etc., or is there a considerable attack?

Thanks in advance
Daniel
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