Using AZ 40XT-11D resist can do this job. It's a useful resist and can
be reflowed at about 130C.

Cheers,



Jin Yu
Optical Imaging and Display Systems
Sharp Laboratories of Europe Ltd.
Edmund Halley Road, Oxford Science Park,
Oxford, OX4 4GB, United Kingdom.
Tel:  +44(0)1865 747711
Fax: +44(0)1865 747719
Email: [email protected]
www.sle.sharp.co.uk



-----Original Message-----
From: Josh [mailto:[email protected]]
Sent: 10 November 2009 17:00
To: [email protected]
Subject: Re: [mems-talk] Microlens fabrication


Reflow method can be very helpful for creating microlenses. See =
"Variable
Focusing Microlens Chip for Potential Sensing Applications" from IEEE
Sensors Journal VOL. 7, NO. 1, JANUARY 2007. The array has been made. =
The
only problem I see is how small lens it can create. Less than 100 um
probably is a problem.

UV curable adhesive is more difficult to handle than photoresist.

I am glad to see more application from it.

Cheers,
Josh



> ---------- Forwarded message ----------
> From: "Glenn Silveira" 
> To: "General MEMS discussion" 
> Date: Mon, 9 Nov 2009 09:27:58 -0800
> Subject: Re: [mems-talk] Microlens fabrication
> Refow sounds difficult and you risk distorting the lens shape. how about
> using underfill with UV curable adhesive to set the sphere array/mold.
>
> Best regards,
> Glenn