Thanks for the suggestions. I think spray coating seems to be a very good
solution to my problem. I am from Arizona State University and I am not sure

if I can find a spray coater at my university. If there is anyone on the
mailing
list from ASU who has a spray coater, kindly send me an email.

Thanks,
-Ameya - [email protected]



On Tue, Nov 10, 2009 at 1:50 PM, Oakes Garrett  wrote:

> Ameya,
>
> Spray coating a thin, conformal film of photoresist might be the first
> step to solving your problem.  Using this technique, one can eliminate
> the problems encountered when spinning resist across topography.
> Percent (non-)uniformity can also be decreased to roughly 10%.
>
> Please feel free to contact me directly if you have any further
> questions.
>
> Best Regards,
>
> Garrett Oakes