hi,
   this depends on the contact angle of the PR on ur substrate surface. greater
contact angle give you higher sag. low surface energy substrate surface may
help.

Best

Guocheng Shao

--- On Fri, 11/13/09, Alasdair Rankin  wrote:


From: Alasdair Rankin 
Subject: Re: [mems-talk] Microlens fabrication
To: "'General MEMS discussion'" 
Date: Friday, November 13, 2009, 2:51 AM


Thanks for the note Jin.  One question that keeps resurfacing for me is
whether you can get hemispherical lenses from resist reflow.  Most of the
literature seems to show lenses with a width of say 100um but only a height
of a couple microns.  Is the pr reflow a reasonable means of achieving a
hemispherical lens with a width of say 25 um and a height of 12-20um?