Hello all,

I need to etch Silicon isotropically to create a hemisphere shape.
Thus, I need to know how smooth DRIE can etch the surface of Silicon about
100 microns.
Is anyone know the surface roughness that DRIE etches the silicon down to
100 microns?
Plus, Do you know that DRIE isotropic etching will form a negative
hemispherical shape?


Thank you


Jiho Song