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MEMSnet Home: MEMS-Talk: Tungsten deposition, e-beam, sputter
Tungsten deposition, e-beam, sputter
2009-11-16
Jauniskis, Linas
2009-11-17
Edward Sebesta
2009-11-24
Henn, Gudrun: Ms.
2009-11-24
Prömpers, Michael
Tungsten deposition, e-beam, sputter
Jauniskis, Linas
2009-11-16
Hi,

While I see e-beam as a recommended technique for depositing tungsten
thin film, I have not been able to find a reference for what type of
crucible to use. Could someone suggest crucible type? Any other
particulars about e-beam of tungsten one should be aware of?

Am also considering sputtering. Is tungsten particularly difficult to
sputter, as compared to say titanium?

Thank you,
Linas.


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