A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Turning Si surface hydrophobic
Turning Si surface hydrophobic
2009-11-17
Miyakawa, Natsuki
2009-11-17
Bill Moffat
2009-11-18
Miyakawa, Natsuki
2009-11-18
Bill Moffat
2009-11-18
Miyakawa, Natsuki
2009-11-18
Ned Flanders
2009-11-19
Gareth Jenkins
2009-11-19
Ned Flanders
2009-11-19
Yonghao Xiu
Turning Si surface hydrophobic
Miyakawa, Natsuki
2009-11-17
Dear all,

Does anyone of you know some methods to turn the surface of thermally oxidized
Si hydrophobic (say contact angle > 70°)? The hydrophobisity should be long-term
stable (> years @ room temperature), thermally stable (> 1h @ 800-900°C), and
chemically stable (esp. under alkaline conditions).


Thank you!

Natsuki
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
The Branford Group
Nano-Master, Inc.
Tanner EDA by Mentor Graphics