A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Turning Si surface hydrophobic
Turning Si surface hydrophobic
2009-11-17
Miyakawa, Natsuki
2009-11-17
Bill Moffat
2009-11-18
Miyakawa, Natsuki
2009-11-18
Bill Moffat
2009-11-18
Miyakawa, Natsuki
2009-11-18
Ned Flanders
2009-11-19
Gareth Jenkins
2009-11-19
Ned Flanders
2009-11-19
Yonghao Xiu
Turning Si surface hydrophobic
Ned Flanders
2009-11-18
Hi,

Your problem, if I understand correctly, is that of making silica
(thermally oxidized silicon) hydrophobic - and I imagine that just
etching that SiO2 would be out of the question, correct?

Nanostructuring the surface (with a laser beam, for instance) will not
necessarily make it hydrophobic. It may, in fact, make it hydrophilic.
It's somewhat of a long story about why, but suffice it to say that
nano (and micro) structured surface will become more hydrophobic or
more hydrophilic, depending on what they were to begin with.

Also, nanostructured surfaces, espeically glass, tend to adsorb all
sorts of stuff, and the surface tension will change drastically during
just a few months. You should look into coating that silica with some
other material, perhaps with ALD.


cheers

m

On 11/17/09, Miyakawa, Natsuki  wrote:
> Dear all,
>
> Does anyone of you know some methods to turn the surface of thermally oxidized
Si hydrophobic (say contact angle > 70°)? The hydrophobisity should be long-term
stable (> years @ room temperature), thermally stable (> 1h @ 800-900°C), and
chemically stable (esp. under alkaline conditions).
>
>
> Thank you!
>
> Natsuki
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
MEMStaff Inc.
Mentor Graphics Corporation
Addison Engineering