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MEMSnet Home: MEMS-Talk: Turning Si surface hydrophobic
Turning Si surface hydrophobic
2009-11-17
Miyakawa, Natsuki
2009-11-17
Bill Moffat
2009-11-18
Miyakawa, Natsuki
2009-11-18
Bill Moffat
2009-11-18
Miyakawa, Natsuki
2009-11-18
Ned Flanders
2009-11-19
Gareth Jenkins
2009-11-19
Ned Flanders
2009-11-19
Yonghao Xiu
Turning Si surface hydrophobic
Yonghao Xiu
2009-11-19
Making the hydrophobic surface stable at 800-900C for 1hr may be difficult. You
may try fluoroalkyl silane treatment. But at the best the surface can withstand
~400C for 30min-1hr in air.
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