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MEMSnet Home: MEMS-Talk: pdms stuck
pdms stuck
2009-11-18
Emanuele Orabona
2009-11-18
Gareth Jenkins
2009-11-19
Emanuele Orabona
2009-11-19
Dirk Renckens - TNW
2009-11-19
Gareth Jenkins
2009-11-20
Emanuele Orabona
2009-11-18
Mikael Evander
2009-11-19
Emanuele Orabona
2009-11-21
amit asthana
pdms stuck
Emanuele Orabona
2009-11-19
Yes i know the paper but the solvents that you have cited cause only
swelling and don't dissolve the pdms.

2009/11/18 Gareth Jenkins :
> Toluene or Chloroform should cause swelling in PDMS and I think are OK with
> SU-8.
>
> Check out this ref for more possible solvents:
> Anal. Chem. 2003, 75, 6544-6554
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