Hi,
As you have a Si heater a good option is the Raman spectroscopy.

Elina Iervolino

PhD student
Delft University of Technology
Office Phone: +31 (0)15-2578040
Web page:www.xensor.nl



-----Original Message-----
From: Edward Sebesta [mailto:[email protected]]
Sent: Thu 11/19/2009 4:31 AM
To: 'General MEMS discussion'
Subject: Re: [mems-talk] Temperature measurement of microheater

Why not measure the spectra of the infrared of the microheater? It should
follow a black body curve of sorts. The hottest region should dominate the
spectra, since radiation intensity follows the fourth power of temperature.

Also, if there are emmission lines in the radiated spectra, their relative
ratio of intensity is a function of temperature. That is how they measure
the temperature of stars.

Ed