I suppose you can spin it as thick as you like. Whether you can do anything
with it is another thing. Also, there are a great many formulations of
Spin-On-Glass.

In semiconductors SOG is spun on and etched back to fill crevices and sharp
topologies but isn'tused as a continuous sheet.

If you don't want any structural properties you might heat it up to 200
degrees and bake it.

The problem though is that if you try to heat it much over 200C to densify
it it is likely to crack. However, there well may be some formulation that
will work for you.

Ed



-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Jiwu Lu
Sent: Friday, November 20, 2009 1:51 AM
To: [email protected]
Subject: [mems-talk] Is it possible to have 30 um SOG?


hi, Gurus:

     Is it possible to have 30 um of SOG on top of a 200nm chromium layer.
The chromium layer are deposited on p-type silicon substrate.


With my best regards!

Yours sincerely: Jiwu Lu