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MEMSnet Home: MEMS-Talk: How to improve adhesion of resist to a metal surface
How to improve adhesion of resist to a metal surface
2009-11-24
Paul Nguyen
2009-11-24
Bill Moffat
How to improve adhesion of resist to a metal surface
Paul Nguyen
2009-11-24
Dear ALL,

Beside best surface cleanliness pre-coating, what other techniques would
improve adhesion of photoresist (very thick up to 100um) to a metal surface,
in particular a NiCo surface?  I would appreciate input from MEMS experts.

Happy Thanksgiving to ALL!

Best regards,
Paul Nguyen
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