Depending on how thick a layer you need, you can use a bubler.

Heat the water and pass O2 through it. Heat the wafer  between 700-900 degrees
in an oven.

It's a good idea to put it in a quartz vessel/tube to prevent contamination.

If you need more details let me know.

Walter @elume.com

----- Original Message -----
From: "Moshe" 
To: 
Sent: Monday, November 30, 2009 4:04 AM
Subject: [mems-talk] How to fabricate isolated film on silicon ?


>I am looking for a way to oxidize silicon to SiO2 to get isolated film .
>
> A wet process also may a good process.
>
> Thank you,
>
> Moshe