I deposit using E-Beam and pre-expose bake at 90 deg C for 60 seconds
typically.

I doubt the E-beam is heating the PR, that would be a tricky issue, I don't
think I can move the sample any further from the gun.

On Tue, Dec 1, 2009 at 11:15 AM,  wrote:

> In order to determine the problem I like to know do you sputter the
> materials or E beam, and are you confident the PR does not exceed the temp
> were lift of becomes problematic.
>
> [email protected]