Dear colleagues,

I am looking for an equipment for precise nondestructive thickness
determination of Si membranes with thicknesses from 1um up to about 20 um.
The membrane size is larger than 200um. The equipment should allow
measurements on 6" (and 5") wafers, has a x-y-table for measurements over
the wafer and a spot size smaller than 200um. I would prefer to measure the
real thickness of the membrane and not to use a profilometer or change of
microscope's focus to calculate the membrane thickness from the wafer
thickness. Information about IR spectrometer with a spot size smaller than
200um or another type of measuring system is deeply appreciated.

        Dr. Roumiana Paneva

        X-FAB GmbH
        Haarbergstasse 61
        D-99097 Erfurt
        Deutschland
        Tel: (+49) 361 42 053 21
        FAX: (+49) 361 42 053 11