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MEMSnet Home: MEMS-Talk: 6-inch Oxide CVD capabilities?
6-inch Oxide CVD capabilities?
1998-10-27
Kevin A. Shaw
1998-11-02
Kevin A. Shaw
6-inch Oxide CVD capabilities?
Kevin A. Shaw
1998-10-27
Hello,
        I'm searching for any fabs (academic or commercial) that would be able
to
deposit oxide on 6-inch wafers.  I would prefer a conformal, low temperature
(<450C) CVD oxide; the wafers will have been metallized with aluminum.  We
will likely have quite a few wafers that will need deposition.
        Any recommendations would be greatly appreciated.

                        Thanks,

                        Kevin Shaw


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